Vortex flow meter with micromachined sensing elements
摘要:
The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.
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