Invention Grant
- Patent Title: Flexible device including two-dimensional material and method of manufacturing the same
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Application No.: US14932392Application Date: 2015-11-04
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Publication No.: US10074737B2Publication Date: 2018-09-11
- Inventor: Jaeho Lee , Kiyoung Lee , Sangyeob Lee , Eunkyu Lee , Jinseong Heo , Seongjun Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0062010 20150430
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L29/778 ; H01L29/66 ; H01L29/16

Abstract:
A method of manufacturing a flexible device including a two-dimensional (2D) material, e.g., graphene, includes forming a dielectric layer on a first substrate, forming a two-dimensional (2D) material layer on the dielectric layer; forming a pattern in the 2D material layer, forming a second substrate on the dielectric layer and the 2D material layer, the first substrate including a flexible material, removing the first substrate, and forming a source electrode, a drain electrode, and a gate electrode on the dielectric layer.
Public/Granted literature
- US20160322486A1 FLEXIBLE DEVICE INCLUDING TWO-DIMENSIONAL MATERIAL AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2016-11-03
Information query
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