Invention Grant
- Patent Title: Pressure sensing element including electrode having protrusion
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Application No.: US15063690Application Date: 2016-03-08
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Publication No.: US10078027B2Publication Date: 2018-09-18
- Inventor: Shinobu Masuda , Keiji Noine , Tetsuyoshi Ogura , Kenichi Ezaki
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2015-056282 20150319
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A pressure sensing element according to one aspect of the present disclosure includes a first electrode including at least one protrusion, a second electrode facing the at least one protrusion, and a dielectric disposed between the first electrode and the second electrode. The dielectric includes a first dielectric and a second dielectric. The first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode. The second dielectric is disposed between a first portion of the first electrode and the first dielectric. The first portion does not include the at least one protrusion. The at least one protrusion has a higher elastic modulus than the first dielectric.
Public/Granted literature
- US20160273987A1 PRESSURE SENSING ELEMENT INCLUDING ELECTRODE HAVING PROTRUSION Public/Granted day:2016-09-22
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