Invention Grant
- Patent Title: Mask assembly, apparatus, and method of manufacturing display apparatus
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Application No.: US15181814Application Date: 2016-06-14
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Publication No.: US10079271B2Publication Date: 2018-09-18
- Inventor: Jaesik Kim , Taemin Kang , Jeongkuk Kim , Youngsuk Cho
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2015-0148821 20151026
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L27/32 ; H01L51/56 ; C23C14/04 ; C23C14/08
Abstract:
Provided are a mask assembly, an apparatus for manufacturing a display apparatus, and method of manufacturing a display apparatus. The mask assembly includes a mask frame and a mask sheet arranged on the mask frame. The mask sheet includes a pattern portion configured to allow a deposition material to pass through an opening of the pattern portion. The pattern portion is recessed from a surface of the mask sheet. In addition, an outermost edge of the pattern portion is uneven.
Public/Granted literature
- US20170117474A1 MASK ASSEMBLY, APPARATUS, AND METHOD OF MANUFACTURING DISPLAY APPARATUS Public/Granted day:2017-04-27
Information query
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