Invention Grant
- Patent Title: MEMS acoustic pressure sensor device and method for making same
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Application No.: US15494535Application Date: 2017-04-23
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Publication No.: US10081538B2Publication Date: 2018-09-25
- Inventor: Chuan-Wei Wang
- Applicant: PixArt Imaging Incorporation
- Applicant Address: TW Hsin-Chu
- Assignee: PIXART IMAGING INCORPORATION
- Current Assignee: PIXART IMAGING INCORPORATION
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Priority: TW100109392A 20110318
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; G01L9/00

Abstract:
The present invention discloses a Micro-Electro-Mechanical System (MEMS) acoustic pressure sensor device and a method for making same. The MEMS device includes: a substrate; a fixed electrode provided on the substrate; and a multilayer structure, which includes multiple metal layers and multiple metal plugs, wherein the multiple metal layers are connected by the multiple metal plugs. A cavity is formed between the multilayer structure and the fixed electrode. Each metal layer in the multilayer structure includes multiple metal sections. The multiple metal sections of one metal layer and those of at least another metal layer are staggered to form a substantially blanket surface as viewed from a moving direction of an acoustic wave.
Public/Granted literature
- US20170225944A1 MEMS ACOUSTIC PRESSURE SENSOR DEVICE AND METHOD FOR MAKING SAME Public/Granted day:2017-08-10
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