Invention Grant
- Patent Title: Microfluidic device and method
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Application No.: US13763404Application Date: 2013-02-08
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Publication No.: US10086370B2Publication Date: 2018-10-02
- Inventor: Stefan Beyer , Dietrich Bonart
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: B01L3/00
- IPC: B01L3/00 ; H01L21/56 ; B81C1/00 ; H01L23/00
Abstract:
A microfluidic device includes a semiconductor chip having a main chip surface. The microfluidic device further includes an encapsulation body embedding the semiconductor chip, the encapsulation body having a main body surface. A microfluidic component extends over the main chip surface and over the main encapsulation body surface and traverses an outline of the main chip surface.
Public/Granted literature
- US20140227147A1 Microfluidic Device and Method Public/Granted day:2014-08-14
Information query
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