- 专利标题： Determining apparatus for determining object stored in cassette
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申请号： US15666215申请日： 2017-08-01
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公开(公告)号： US10094951B2公开(公告)日： 2018-10-09
- 发明人: Ken Togashi , Masahiro Tsukamoto
- 申请人： DISCO CORPORATION
- 申请人地址： JP Tokyo
- 专利权人： DISCO CORPORATION
- 当前专利权人： DISCO CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Greer Burns & Crain Ltd.
- 优先权： JP2016-158408 20160812
- 主分类号： G01V8/20
- IPC分类号： G01V8/20
摘要：
Apparatus determines whether a stored object is a wafer alone or a frame unit formed by uniting the wafer and a ring frame. The apparatus includes first and second detecting units, the second detecting unit being stored more shallowly than the first detecting unit. The apparatus determines whether light transmitted by the first detecting unit is blocked by the object and does not reach a light receiving portion of the first detecting unit. When light transmitted from the second detecting unit is blocked by the object and does not reach a light receiving portion of the second detecting unit, the apparatus determines that the object is the frame unit, whereas when the light transmitted from the second detecting unit is not blocked by the object and reaches the light receiving portion of the second detecting unit, the apparatus determines that the object is the wafer.
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