Invention Grant
- Patent Title: Selective SAC capping on fin field effect transistor structures and related methods
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Application No.: US15259472Application Date: 2016-09-08
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Publication No.: US10096604B2Publication Date: 2018-10-09
- Inventor: Min-hwa Chi , Hui Zang
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L23/535 ; H01L29/45 ; H01L29/66 ; H01L29/78

Abstract:
FinFET structures and methods of forming such structures. The FinFET structures including a substrate; at least two gates disposed on the substrate; a plurality of source/drain regions within the substrate adjacent to each of the gates; a dielectric disposed between each gate and the plurality of source/drain regions adjacent to each gate; a dielectric capping layer disposed on a first one of the at least two gates, wherein no dielectric capping layer is disposed on a second one of the at least two gates; and a local interconnect electrically connected to the second one of the at least two gates, wherein the dielectric capping layer disposed on the first one of the at least two gates prevents an electrical connection between the local interconnect and the first one of the at least two gates.
Public/Granted literature
- US20180069009A1 SELECTIVE SAC CAPPING ON FIN FIELD EFFECT TRANSISTOR STRUCTURES AND RELATED METHODS Public/Granted day:2018-03-08
Information query
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