- 专利标题: Device for treating a disc-shaped substrate and support adapter
-
申请号: US15166431申请日: 2016-05-27
-
公开(公告)号: US10101672B2公开(公告)日: 2018-10-16
- 发明人: Sven Hansen , Henrik Petry
- 申请人: SUSS MicroTec Lithography GmbH
- 申请人地址: DE Garching
- 专利权人: SUSS MICROTEC LITHOGRAPHY GMBH
- 当前专利权人: SUSS MICROTEC LITHOGRAPHY GMBH
- 当前专利权人地址: DE Garching
- 代理机构: Hayes Soloway PC
- 优先权: NL2014864 20150527
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; H01L21/68
摘要:
A device for treating a disc-shaped substrate is disclosed, comprising a support which has a support face for the disc-shaped substrate and a support adapter which can be coupled to the support and can support a mask used for treating the disc-shaped substrate, wherein an interface is provided which detects the coupling of the support adapter to the support and wherein a control system is provided which cooperates with the interface and detects whether the support adapter is coupled to the support, in particular whether the interface is occupied. A support adapter for use in a device of this type is further disclosed.
公开/授权文献
信息查询
IPC分类: