发明授权
- 专利标题: Semiconductor devices having lower and upper fins and method for fabricating the same
-
申请号: US14690575申请日: 2015-04-20
-
公开(公告)号: US10103266B2公开(公告)日: 2018-10-16
- 发明人: Sung-Min Kim , Kyung-Seok Oh , Cheol Kim , Heon-Jong Shin , Jong-Ryeol Yoo , Hyun-Jung Lee , Seong-Hoon Jeong
- 申请人: Sung-Min Kim , Kyung-Seok Oh , Cheol Kim , Heon-Jong Shin , Jong-Ryeol Yoo , Hyun-Jung Lee , Seong-Hoon Jeong
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel, P.A.
- 优先权: KR10-2014-0084463 20140707
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/84 ; H01L29/66 ; H01L27/12
摘要:
Provided are a semiconductor device and a method for fabricating the same. The semiconductor device includes a lower fin that protrudes from a substrate and extends in a first direction, an oxide film the lower fin, an upper fin that protrudes from the oxide film and that is spaced apart from the lower fin at a position corresponding to the lower fin, and a gate structure the upper fin that extends in a second direction to intersect the upper fin, wherein germanium (Ge) is included in a portion of the oxide film located between the lower fin and the upper fin.
公开/授权文献
信息查询
IPC分类: