- 专利标题: Laser apparatus and extreme ultraviolet light generation system
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申请号: US15651253申请日: 2017-07-17
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公开(公告)号: US10122145B2公开(公告)日: 2018-11-06
- 发明人: Yoshiaki Kurosawa , Hideo Hoshino
- 申请人: GIGAPHOTON INC.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 代理机构: Studebaker & Brackett PC
- 主分类号: H01S3/10
- IPC分类号: H01S3/10 ; H01S3/00 ; H01S3/034 ; H01S3/08 ; H01S3/095 ; H01S3/23 ; H05G2/00 ; H01S3/097
摘要:
A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.