Invention Grant
- Patent Title: Stripping device and display substrate production line
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Application No.: US15506301Application Date: 2016-02-19
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Publication No.: US10137482B2Publication Date: 2018-11-27
- Inventor: Fan Zhang , Wei Hu , Xianhao Chen , Jianzhao Liu , Jianwei Wang , Zuhong Liu , Daeoh Oh
- Applicant: BOE Technology Group Co., Ltd. , Hefei BOE Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Beijing CN Hefei
- Assignee: BOE Technology Group Co., Ltd.,Hefei BOE Optoelectronics Technology Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.,Hefei BOE Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Beijing CN Hefei
- Agency: Banner & Witcoff, Ltd.
- Priority: CN201510601440 20150918
- International Application: PCT/CN2016/074099 WO 20160219
- International Announcement: WO2017/045363 WO 20170323
- Main IPC: B08B3/10
- IPC: B08B3/10 ; B08B3/02 ; G03F7/42 ; G02F1/1333 ; G02F1/13 ; H01L21/67 ; H01L21/677

Abstract:
A stripping device and a display substrate production line are provided. The stripping device comprises a stripping chamber. A stripping liquid with a set temperature is provided within the stripping chamber; the stripping device further comprising a liquid jet component, the liquid jet component includes a liquid supplying pipeline and a liquid jet head, the liquid supplying pipeline is configured to supply a cleaning liquid to the liquid jet head, the liquid jet head is configured to output the cleaning liquid, the liquid supplying pipeline is arranged in the stripping chamber, and the stripping liquid enables the cleaning liquid in the liquid supplying pipeline to reach the set temperature. The stripping device enables the cleaning liquid to reach the set temperature, such that the stripping liquid and the photoresist remaining on the display substrate are effectively removed, the stripping liquid is prevented from being separated out on the display substrate and is further prevented from being crystallized to block an output port of the liquid jet head; and the stripping device further effectively uses the thermal energy in the stripping chamber to save energy consumption.
Public/Granted literature
- US20170274426A1 Stripping Device and Display Substrate Production Line Public/Granted day:2017-09-28
Information query
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