- 专利标题: Oven enclosure for optical components with integrated purge gas pre-heater
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申请号: US15358507申请日: 2016-11-22
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公开(公告)号: US10153215B2公开(公告)日: 2018-12-11
- 发明人: Dirk Woll
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Hodgson Russ LLP
- 主分类号: G02F2/02
- IPC分类号: G02F2/02 ; H01L21/66 ; F27D21/02 ; G01N21/95 ; G03F1/84 ; H01L21/67 ; G03F7/20
摘要:
A cartridge in an oven enclosure includes a pre-heating feature for an incoming purge gas before the purge gas enters the space around an optical component, such as a nonlinear optical crystal, in an oven cell. The incoming purge gas can be pre-heated as it travels along a gas pathway around a cartridge. The cartridge can include a heater. The oven enclosure can have two windows positioned such that a laser beam can enter through one of the windows, pass through the optical component, and exit through another of the windows. A second harmonic beam can be generated with the optical component.
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