Invention Grant
- Patent Title: Apparatus and method for solid state source array design and fabrication
-
Application No.: US14538733Application Date: 2014-11-11
-
Publication No.: US10154586B2Publication Date: 2018-12-11
- Inventor: Sriskantharajah Thirunavukarasu , Joseph Johnson
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: F26B3/30
- IPC: F26B3/30 ; F25B29/00 ; H01L29/18 ; F25B21/02 ; H05K1/11

Abstract:
Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include a base having a plurality of vias formed in a bottom surface of the base, and wherein an electrical connector is disposed in each via, a first metallic layer disposed on a top surface of the base and electrically coupled to the electrical connectors disposed in the plurality of via, and a plurality of solid state light sources disposed on a top surface of the metallic layer and electrically coupled to the metallic layer.
Public/Granted literature
- US20160131352A1 APPARATUS AND METHOD FOR SOLID STATE SOURCE ARRAY DESIGN AND FABRICATION Public/Granted day:2016-05-12
Information query
IPC分类: