Invention Grant
- Patent Title: Bubble removing unit and substrate treating apparatus including the same
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Application No.: US15195225Application Date: 2016-06-28
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Publication No.: US10166492B2Publication Date: 2019-01-01
- Inventor: Jaehyeok Yu , Jae-Youl Kim , Oh Jin Kwon
- Applicant: Semes Co., Ltd.
- Applicant Address: KR Chungcheongnam-do
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Jenkins, Wilson, Taylor & Hunt, P.A.
- Priority: KR10-2015-0093159 20150630
- Main IPC: B01D19/00
- IPC: B01D19/00

Abstract:
A bubble removing unit is disclosed including a body having an inner space, through which a liquid flows, in an interior thereof, a liquid introducing pipe through which the liquid is supplied to the body, a liquid discharging pipe through which the liquid, from which bubbles are removed, is discharged from the body, a bubble discharging pipe through which the bubbles are discharged from the inner space, and a rod-shaped bar situated in the inner space and a length of which extends in a lengthwise direction of the body, wherein a variable cross-section part situated between the liquid introducing pipe and the liquid discharging pipe and a cross-section of which varies along the lengthwise direction of the body is provided in the inner space of the body.
Public/Granted literature
- US20170001127A1 BUBBLE REMOVING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME Public/Granted day:2017-01-05
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