Invention Grant
- Patent Title: Integrated particle filter for MEMS device
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Application No.: US15419663Application Date: 2017-01-30
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Publication No.: US10167188B2Publication Date: 2019-01-01
- Inventor: Janhavi S. Agashe , Anthony D. Minervini , Ruchir M. Dave , Jae H. Lee
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Womble Bond Dickinson (US) LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B7/00 ; B01D46/00 ; B81C1/00 ; H04R19/04 ; H04R31/00

Abstract:
A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.
Public/Granted literature
- US20180215609A1 INTEGRATED PARTICLE FILTER FOR MEMS DEVICE Public/Granted day:2018-08-02
Information query
IPC分类: