Invention Grant
- Patent Title: Fabrication of porous silicon electrochemical capacitors
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Application No.: US13997881Application Date: 2011-12-27
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Publication No.: US10170244B2Publication Date: 2019-01-01
- Inventor: Donald S. Gardner , Cary L. Pint , Charles W. Holzwarth , Wei Jin , Zhaohui Chen , Yang Liu , Eric C. Hannah , John L. Gustafson
- Applicant: Donald S. Gardner , Cary L. Pint , Charles W. Holzwarth , Wei Jin , Zhaohui Chen , Yang Liu , Eric C. Hannah , John L. Gustafson
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Womble Bond Dickinson (US) LLP
- International Application: PCT/US2011/067434 WO 20111227
- International Announcement: WO2013/100916 WO 20130704
- Main IPC: H01G11/86
- IPC: H01G11/86 ; H01G4/008 ; H01G11/30 ; H01G11/00 ; H01G11/26

Abstract:
Methods of forming microelectronic structures are described. Embodiments of those methods may include forming an electrochemical capacitor device by forming pores in low-purity silicon materials. Various embodiments described herein enable the fabrication of high capacitive devices using low cost techniques.
Public/Granted literature
- US20140233152A1 FABRICATION OF POROUS SILICON ELECTROCHEMICAL CAPACITORS Public/Granted day:2014-08-21
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