- 专利标题: Piezoelectric MEMS microphone
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申请号: US14208827申请日: 2014-03-13
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公开(公告)号: US10170685B2公开(公告)日: 2019-01-01
- 发明人: Karl Grosh , Robert J. Littrell
- 申请人: The Regents of the University of Michigan , Vesper Technologies Inc.
- 申请人地址: US MI Ann Arbor US MA Boston
- 专利权人: The Regents of The University of Michigan,Vesper Technologies Inc.
- 当前专利权人: The Regents of The University of Michigan,Vesper Technologies Inc.
- 当前专利权人地址: US MI Ann Arbor US MA Boston
- 代理机构: Reising Ethington P.C.
- 主分类号: H04R17/02
- IPC分类号: H04R17/02 ; H01L41/083 ; H01L41/187 ; H01L41/113 ; B81B3/00 ; H04R17/00
摘要:
A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.
公开/授权文献
- US20150350792A1 PIEZOELECTRIC MEMS MICROPHONE 公开/授权日:2015-12-03
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