Invention Grant
- Patent Title: HEMT transistor
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Application No.: US15535933Application Date: 2015-12-15
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Publication No.: US10177239B2Publication Date: 2019-01-08
- Inventor: Frédéric Morancho , Saleem Hamady , Bilal Beydoun
- Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE—CNRS- , UNIVERSITE LIBANAISE
- Applicant Address: FR Paris LB Beyrouth
- Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE LIBANAISE
- Current Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE LIBANAISE
- Current Assignee Address: FR Paris LB Beyrouth
- Agency: Volpe and Koenig, P.C.
- Priority: FR1462461 20141215
- International Application: PCT/FR2015/053503 WO 20151215
- International Announcement: WO2016/097576 WO 20160623
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/10 ; H01L29/778 ; H01L29/20

Abstract:
Heterojunction structure, also referred to as a heterostructure, of semiconductor material, in particular for a high electron mobility transistor (HEMT), includes a substrate, a stack of at least three buffer layers of a same semiconductor material with a wide bandgap EG1 based on a column-III nitride, namely an unintentionally doped first buffer layer, a second buffer layer, an unintentionally doped third buffer layer, an unintentionally doped intermediate layer, and a barrier layer arranged on the intermediate layer, said barrier layer being of a semiconductor material with a wide bandgap EG2 based on a column-III nitride; the second buffer layer has constant P+ doping throughout some or all of its thickness; and the third buffer layer includes a first region which is unintentionally doped throughout its entire thickness and at least one second region adjacent to said first region with N+ doping surrounding the first region.
Public/Granted literature
- US20180069090A1 HEMT TRANSISTOR Public/Granted day:2018-03-08
Information query
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