- 专利标题: Chromatic confocal sensor
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申请号: US15724328申请日: 2017-10-04
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公开(公告)号: US10197382B2公开(公告)日: 2019-02-05
- 发明人: Sadayuki Matsumiya , Kenji Okabe , Koji Kubo , Nobuya Kaneko
- 申请人: Mitutoyo Corporation
- 申请人地址: JP Kawasaki-Shi
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kawasaki-Shi
- 代理机构: Rankin, Hill & Clark LLP
- 优先权: JP2016-205754 20161020
- 主分类号: G01N33/08
- IPC分类号: G01N33/08 ; G01B11/00 ; G01J3/02 ; G01J3/28 ; G01B11/06
摘要:
A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.
公开/授权文献
- US20180112966A1 CHROMATIC CONFOCAL SENSOR 公开/授权日:2018-04-26
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