- 专利标题: Through-hole forming method, through-hole forming apparatus, and method of manufacturing glass substrate provided with through-hole
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申请号: US14965111申请日: 2015-12-10
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公开(公告)号: US10201867B2公开(公告)日: 2019-02-12
- 发明人: Motoshi Ono
- 申请人: AGC Inc.
- 申请人地址: JP Chiyoda-ku
- 专利权人: AGC Inc.
- 当前专利权人: AGC Inc.
- 当前专利权人地址: JP Chiyoda-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2014-254424 20141216
- 主分类号: C03B33/10
- IPC分类号: C03B33/10 ; C03C23/00 ; B23K9/013 ; B23K26/382 ; B26F1/28 ; B23K26/384 ; B23K103/00
摘要:
Disclosed is a through-hole forming method including a process of forming, by condensing and irradiating a laser beam onto an insulation substrate through a lens, a through-hole that passes through the insulation substrate in a thickness direction of the insulation substrate. A medium between the lens and the insulation substrate is air. A converging half angle θ that is calculated from a focal length f of the lens and a beam diameter d of the laser beam that enters the lens by using expression (1) satisfies expression (2): (d/2)/f=tan θ (1), and 0.16≤sin θ≤0.22 (2).
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