Invention Grant
- Patent Title: Through-hole forming method, through-hole forming apparatus, and method of manufacturing glass substrate provided with through-hole
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Application No.: US14965111Application Date: 2015-12-10
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Publication No.: US10201867B2Publication Date: 2019-02-12
- Inventor: Motoshi Ono
- Applicant: AGC Inc.
- Applicant Address: JP Chiyoda-ku
- Assignee: AGC Inc.
- Current Assignee: AGC Inc.
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-254424 20141216
- Main IPC: C03B33/10
- IPC: C03B33/10 ; C03C23/00 ; B23K9/013 ; B23K26/382 ; B26F1/28 ; B23K26/384 ; B23K103/00

Abstract:
Disclosed is a through-hole forming method including a process of forming, by condensing and irradiating a laser beam onto an insulation substrate through a lens, a through-hole that passes through the insulation substrate in a thickness direction of the insulation substrate. A medium between the lens and the insulation substrate is air. A converging half angle θ that is calculated from a focal length f of the lens and a beam diameter d of the laser beam that enters the lens by using expression (1) satisfies expression (2): (d/2)/f=tan θ (1), and 0.16≤sin θ≤0.22 (2).
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