A computer implemented method for determining performance of a semiconductor device is provided. The method includes providing a technology computer aided design data set corresponding to nominal performance of the semiconductor device, identifying a plurality of process variation sources that correspond to process variations that occur during the manufacturing of the semiconductor device, generating a nominal value look-up table of electrical parameters of the semiconductor device using nominal values of each of the plurality of process variation sources, and generating a plurality of process variation look-up tables of electrical parameters of the semiconductor device using variation values corresponding to each of the plurality of process variation sources that are identified as corresponding to the semiconductor device.