Invention Grant
- Patent Title: Carbon nanotube thin film transistor and manufacturing method thereof
-
Application No.: US15518664Application Date: 2016-09-19
-
Publication No.: US10205109B2Publication Date: 2019-02-12
- Inventor: Xueyan Tian
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Dilworth & Barrese, LLP
- Agent Michael J. Musella, Esq.
- Priority: CN201610011912 20160108
- International Application: PCT/CN2016/099306 WO 20160919
- International Announcement: WO2017/118093 WO 20170713
- Main IPC: H01L51/05
- IPC: H01L51/05 ; H01L29/66 ; H01L29/786 ; H01L51/00

Abstract:
A carbon nanotube thin film transistor and a manufacturing method thereof are provided in the embodiments of the present disclosure. The carbon nanotube thin film transistor includes: a base substrate; a gate electrode, a semiconductor layer, a source electrode and a drain electrode, which are disposed on the base substrate, the semiconductor layer includes a poly(3-hexylthiophene) layer and a mixing layer of semiconducting carbon nanotube and poly(3-hexylthiophene) which are stacked. The semiconducting carbon nanotube thin film transistor has a high purity, thus the metallic carbon nanotubes are substantially cleared out and the electrical property of the thin film transistor is ensured, so that the manufactured carbon nanotube thin film transistor has good electrical properties.
Public/Granted literature
- US20180026214A1 CARBON NANOTUBE THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-01-25
Information query
IPC分类: