Invention Grant
- Patent Title: Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
-
Application No.: US15017363Application Date: 2016-02-05
-
Publication No.: US10207918B2Publication Date: 2019-02-19
- Inventor: Chienliu Chang
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2008-295799 20081119
- Main IPC: B06B1/02
- IPC: B06B1/02 ; H04R19/00 ; H04R31/00 ; H02N11/00 ; B81C1/00
Abstract:
An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.
Public/Granted literature
Information query
IPC分类:
