Invention Grant
- Patent Title: Evaporation source and evaporation device
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Application No.: US15151292Application Date: 2016-05-10
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Publication No.: US10208375B2Publication Date: 2019-02-19
- Inventor: Dejiang Zhao , Seiji Fujino , Changhai Feng
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201510514260 20150820
- Main IPC: H05B3/48
- IPC: H05B3/48 ; H05B3/46 ; H05B3/56 ; H05B3/58 ; C23C14/24 ; H01L51/56 ; H01L51/00 ; H01L51/05
Abstract:
An evaporation source includes a heat source structure and an evaporation container for accommodating a to-be-evaporated material. The heat source structure includes a heat source and a thermal conductor. The thermal conductor is in contact with the evaporation container, and the heat source is at the thermal conductor and around the evaporation container.
Public/Granted literature
- US20170051395A1 EVAPORATION SOURCE AND EVAPORATION DEVICE Public/Granted day:2017-02-23
Information query
