Invention Grant
- Patent Title: Micro-electro-mechanical system sensor devices
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Application No.: US15819555Application Date: 2017-11-21
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Publication No.: US10214413B2Publication Date: 2019-02-26
- Inventor: Gunar Lorenz , Nikolay Ilkov , Georg Lischka
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102016122525 20161122
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00
Abstract:
A MEMS sensor device includes an electrically conductive membrane and an electrically conductive closed loop structure. The closed loop structure is arranged in proximity to the membrane and is configured to reduce eddy currents in the membrane.
Public/Granted literature
- US20180141802A1 MICRO-ELECTRO-MECHANICAL SYSTEM SENSOR DEVICES Public/Granted day:2018-05-24
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