Invention Grant
- Patent Title: Method for shape classification of an object
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Application No.: US14984670Application Date: 2015-12-30
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Publication No.: US10215560B2Publication Date: 2019-02-26
- Inventor: Laurent Hermans , Eric Delfosse , Frans Nijs , Francis Thissen , Johan De Greeve
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Tencor Corporation
- Current Assignee: KLA Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Simpson & Simpson, PLLC
- Main IPC: G01B21/20
- IPC: G01B21/20 ; G01B21/30 ; G06K9/00 ; G06K9/62 ; G06K9/48

Abstract:
A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.
Public/Granted literature
- US20160282111A1 METHOD FOR SHAPE CLASSIFICATION OF AN OBJECT Public/Granted day:2016-09-29
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