- 专利标题: Method for shape classification of an object
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申请号: US14984670申请日: 2015-12-30
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公开(公告)号: US10215560B2公开(公告)日: 2019-02-26
- 发明人: Laurent Hermans , Eric Delfosse , Frans Nijs , Francis Thissen , Johan De Greeve
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA Tencor Corporation
- 当前专利权人: KLA Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Simpson & Simpson, PLLC
- 主分类号: G01B21/20
- IPC分类号: G01B21/20 ; G01B21/30 ; G06K9/00 ; G06K9/62 ; G06K9/48
摘要:
A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.
公开/授权文献
- US20160282111A1 METHOD FOR SHAPE CLASSIFICATION OF AN OBJECT 公开/授权日:2016-09-29
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