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公开(公告)号：US20180209784A1
公开(公告)日：2018-07-26
申请号：US15329778
申请日：2016-11-04
Applicant: KLA-Tencor Corporation
Inventor： Guoheng Zhao , Maarten van der Burgt , Sheng Liu , Andy Hill , Johan De Greeve , Karel van Gils
CPC classification number: G01B11/2518 , G01B11/0608 , G01B11/24 , G01B11/2513 , G01B11/2522 , G01B2210/56
Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.
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公开(公告)号：US20200033121A1
公开(公告)日：2020-01-30
申请号：US16513091
申请日：2019-07-16
Applicant: KLA-TENCOR CORPORATION
Inventor： Christophe Wouters , Kristof Joris , Johan De Greeve
IPC: G01B11/28
Abstract: 3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined. The system includes a broadband light source, a microlens array, a tunable color filter, a lens system, and a detector. The microlens array can focus a light beam to a points in a focal plane of the microlens array. The tunable color filter can narrow the light beam to a band at a central wavelength. The lens system can provide longitudinal chromatic aberration whereby different wavelengths are imaged at different distances from the lens system.
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Patent Agency Ranking
公开(公告)号：US11287248B2
公开(公告)日：2022-03-29
申请号：US16806076
申请日：2020-03-02
Applicant: KLA-Tencor Corporation
Inventor： Guoheng Zhao , Maarten van der Burgt , Sheng Liu , Andy Hill , Johan De Greeve , Karel van Gils
Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.
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公开(公告)号：US20200217651A1
公开(公告)日：2020-07-09
申请号：US16806076
申请日：2020-03-02
Applicant: KLA-Tencor Corporation
Inventor： Guoheng Zhao , Maarten van der Burgt , Sheng Liu , Andy Hill , Johan De Greeve , Karel van Gils
Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.
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公开(公告)号：US10215560B2
公开(公告)日：2019-02-26
申请号：US14984670
申请日：2015-12-30
Applicant: KLA-Tencor Corporation
Inventor： Laurent Hermans , Eric Delfosse , Frans Nijs , Francis Thissen , Johan De Greeve
Abstract: A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.
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公开(公告)号：US09886764B2
公开(公告)日：2018-02-06
申请号：US14926984
申请日：2015-10-29
Applicant: KLA-TENCOR CORPORATION
Inventor： Guoheng Zhao , Stanley E. Stokowski , Andrew Hill , Johan De Greeve , Maarten Van Der Burgt , Karel Van Gils
CPC classification number: G06T7/586 , G01B11/0608 , G01B11/2513 , G01B11/2522 , G06T2207/10052 , G06T2207/20208 , H04N5/37206
Abstract: The invention relates to an image acquisition system and an image acquisition method, as well as to an inspection system having at least one such image acquisition system. A projector projects a pattern on a surface of a sample, a camera records light intensity information from within at least two detection fields defined by the camera on the surface of the sample. A relative motion between the sample on the one hand and the camera and projector on the other hand is generated. From the acquired at least one image a height profile of the surface of the sample may be inferred. The pattern may comprise a number of sub-patterns related to each other by a phase shift. Alternatively, the pattern may be a fringe pattern.
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公开(公告)号：US20160282111A1
公开(公告)日：2016-09-29
申请号：US14984670
申请日：2015-12-30
Applicant: KLA-Tencor Corporation
Inventor： Laurent Hermans , Eric Delfosse , Frans Nijs , Francis Thissen , Johan De Greeve
CPC classification number: G01B21/20 , G01B21/30 , G06K9/00214 , G06K9/6211 , G06K2009/487
Abstract: A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.
Abstract translation: 提供了一种对象的形状分类方法。 提供了形状类别，其指定相对于对象的平面和点，并且还为每个这样的点指定至少一个极限坐标，限定坐标在垂直于平面的方向上定义所考虑的对象的形状 对象被分类为相应的形状类别的顺序。 形状类别可以由用户提供，使得该方法非常灵活。 形状类别可以特别地从表示待定义的形状类别的对象的一组样本导出。 对于分类，在形状类别中定义的每个点处测量对象的表面的位置，并将结果与相应的极限坐标进行比较。
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