Method and System for Optical Three Dimensional Topography Measurement

    公开(公告)号:US20180209784A1

    公开(公告)日:2018-07-26

    申请号:US15329778

    申请日:2016-11-04

    Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.

    CHROMATIC CONFOCAL AREA SENSOR
    2.
    发明申请

    公开(公告)号:US20200033121A1

    公开(公告)日:2020-01-30

    申请号:US16513091

    申请日:2019-07-16

    Abstract: 3D measurements of features on a workpiece, such as ball height, co-planarity, component thickness, or warpage, are determined. The system includes a broadband light source, a microlens array, a tunable color filter, a lens system, and a detector. The microlens array can focus a light beam to a points in a focal plane of the microlens array. The tunable color filter can narrow the light beam to a band at a central wavelength. The lens system can provide longitudinal chromatic aberration whereby different wavelengths are imaged at different distances from the lens system.

    Method and system for optical three dimensional topography measurement

    公开(公告)号:US11287248B2

    公开(公告)日:2022-03-29

    申请号:US16806076

    申请日:2020-03-02

    Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.

    Method and System for Optical Three Dimensional Topography Measurement

    公开(公告)号:US20200217651A1

    公开(公告)日:2020-07-09

    申请号:US16806076

    申请日:2020-03-02

    Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.

    Method for shape classification of an object

    公开(公告)号:US10215560B2

    公开(公告)日:2019-02-26

    申请号:US14984670

    申请日:2015-12-30

    Abstract: A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.

    METHOD FOR SHAPE CLASSIFICATION OF AN OBJECT
    7.
    发明申请
    METHOD FOR SHAPE CLASSIFICATION OF AN OBJECT 审中-公开
    对象形状分类方法

    公开(公告)号:US20160282111A1

    公开(公告)日:2016-09-29

    申请号:US14984670

    申请日:2015-12-30

    Abstract: A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.

    Abstract translation: 提供了一种对象的形状分类方法。 提供了形状类别,其指定相对于对象的平面和点,并且还为每个这样的点指定至少一个极限坐标,限定坐标在垂直于平面的方向上定义所考虑的对象的形状 对象被分类为相应的形状类别的顺序。 形状类别可以由用户提供,使得该方法非常灵活。 形状类别可以特别地从表示待定义的形状类别的对象的一组样本导出。 对于分类,在形状类别中定义的每个点处测量对象的表面的位置,并将结果与​​相应的极限坐标进行比较。

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