- 专利标题： Microelectromechanical sensing structure for a pressure sensor including a deformable test structure
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申请号： US15475924申请日： 2017-03-31
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公开(公告)号： US10215652B2公开(公告)日： 2019-02-26
- 发明人: Alberto Pagani
- 申请人： STMICROELECTRONICS S.R.L.
- 申请人地址： IT Agrate Brianza
- 专利权人： STMICROELECTRONICS S.R.L.
- 当前专利权人： STMICROELECTRONICS S.R.L.
- 当前专利权人地址： IT Agrate Brianza
- 代理机构： Seed IP Law Group LLP
- 优先权： ITTO2014A0193 20140312
- 主分类号： G01L9/00
- IPC分类号： G01L9/00 ; G01L27/00
摘要：
A microelectromechanical sensing structure having a membrane region including a membrane that undergoes deformation as a function of a pressure and a first actuator that is controlled in a first operating mode and a second operating mode, the first actuator being such that, when it operates in the second operating mode, it contacts the membrane region and deforms the membrane in a way different from when it operates in the first operating mode.
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