- 专利标题: Imprint method, imprint apparatus, and method of manufacturing article
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申请号: US15012985申请日: 2016-02-02
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公开(公告)号: US10216104B2公开(公告)日: 2019-02-26
- 发明人: Kazuki Nakagawa
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2015-020611 20150204
- 主分类号: G03F9/00
- IPC分类号: G03F9/00 ; G03F7/00 ; B29C43/58
摘要:
The present invention provides an imprint method of forming a pattern on a shot region formed on a substrate by using a mold having a pattern region, the method comprising performing control for deformation of at least one of the pattern region and the shot region in accordance with a deformation amount, obtaining a shift amount between each of a plurality of marks provided on the pattern region and a corresponding one of a plurality of marks provided, on the shot region after the deformation, selecting marks to be used for controlling an overlay between the pattern region and the shot region so as to satisfy a preset condition based on the shift amounts, and performing feedback control for the overlay based on detection results on positions of the selected marks, after the deformation in the performing control for deformation.
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