Invention Grant
- Patent Title: Resonance MEMS mirror control system
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Application No.: US15256909Application Date: 2016-09-06
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Publication No.: US10228555B2Publication Date: 2019-03-12
- Inventor: Sason Sourani
- Applicant: STMicroelectronics Ltd
- Applicant Address: IL Netanya
- Assignee: STMicroelectronics Ltd
- Current Assignee: STMicroelectronics Ltd
- Current Assignee Address: IL Netanya
- Agency: Crowe & Dunlevy
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G02B26/08 ; G09G3/34 ; H02P25/032

Abstract:
The present disclosure provides a system and method for controlling operation of a resonance MEMS mirror. The system and method includes activating either an in-plane or staggered MEMS mirror via sets of activation pulses applied to the MEMS mirror, detecting current at the MEMS mirror, generating a window for detecting a change in a direction of the current at the MEMS mirror, and terminating the window and the activation pulse if a change in the current direction is detected during the window. In some embodiments, two sets of activation pulses are applied to the MEMS mirror.
Public/Granted literature
- US20180067303A1 RESONANCE MEMS MIRROR CONTROL SYSTEM Public/Granted day:2018-03-08
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