Resonance MEMS mirror control system
Abstract:
The present disclosure provides a system and method for controlling operation of a resonance MEMS mirror. The system and method includes activating either an in-plane or staggered MEMS mirror via sets of activation pulses applied to the MEMS mirror, detecting current at the MEMS mirror, generating a window for detecting a change in a direction of the current at the MEMS mirror, and terminating the window and the activation pulse if a change in the current direction is detected during the window. In some embodiments, two sets of activation pulses are applied to the MEMS mirror.
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