A semiconductor device includes a semiconductor substrate of a first conductivity type, having a first principal surface and a second principal surface, a silicon carbide semiconductor layer of the first conductivity type, disposed on the first principal surface, a first electrode disposed on the silicon carbide semiconductor layer, and a second electrode disposed on the second principal surface and forming an ohmic junction with the semiconductor substrate. The semiconductor device satisfies 0.13≤Rc/Rd, where Rc is the contact resistance between the second principal surface and the second electrode at room temperature and Rd is the resistance of the silicon carbide semiconductor layer in a direction normal to the first principal surface at room temperature.