Invention Grant
- Patent Title: Interconnects with hybrid metallization
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Application No.: US15640748Application Date: 2017-07-03
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Publication No.: US10236206B2Publication Date: 2019-03-19
- Inventor: Robert J. Fox, III
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/768 ; H01L23/532

Abstract:
Structures for interconnects and methods for forming interconnects. A dual-damascene opening is formed in a dielectric layer and a first liner is formed on the dielectric layer at one or more sidewalls of the dual-damascene opening. A first conductor layer is formed in a portion of the dual-damascene opening. The first liner is removed from the one or more sidewalls of the dual-damascene opening vertically between the first conductor layer and a top surface of the dielectric layer. After the first liner is removed, a second liner is formed on the dielectric layer at the one or more sidewalls of the dual-damascene opening between the first conductor layer and the top surface of the dielectric layer. A second conductor layer is formed in the dual-damascene opening between the first conductor layer and the top surface of the dielectric layer. The first and second liner materials differ in composition.
Public/Granted literature
- US20190006234A1 INTERCONNECTS WITH HYBRID METALLIZATION Public/Granted day:2019-01-03
Information query
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