Invention Grant
- Patent Title: Strain retention semiconductor member for channel SiGe layer of pFET
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Application No.: US15848591Application Date: 2017-12-20
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Publication No.: US10236343B2Publication Date: 2019-03-19
- Inventor: Dina H. Triyoso , Timothy J. McArdle , Judson R. Holt , Amy L. Child , George R. Mulfinger
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L21/762 ; H01L29/66 ; H01L29/786

Abstract:
A pFET includes a semiconductor-on-insulator (SOI) substrate; and a trench isolation within the SOI substrate, the trench isolation including a raised portion extending above an upper surface of the SOI substrate. A compressive channel silicon germanium (cSiGe) layer is over the SOI substrate. A strain retention member is positioned between at least a portion of the raised portion of the trench isolation and the compressive cSiGe layer. A gate and source/drain regions are positioned over the compressive cSiGe layer.
Public/Granted literature
- US20180190768A1 STRAIN RETENTION SEMICONDUCTOR MEMBER FOR CHANNEL SiGe LAYER OF pFET Public/Granted day:2018-07-05
Information query
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