Invention Grant
- Patent Title: Differential split-electrode feedthrough cancellation mechanism
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Application No.: US14836462Application Date: 2015-08-26
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Publication No.: US10236858B1Publication Date: 2019-03-19
- Inventor: Logan Sorenson , Raviv Perahia , Hung Nguyen , David Chang
- Applicant: HRL LABORATORIES, LLC
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/047 ; H01L41/113 ; H03H9/17 ; H03H9/25 ; H03F3/45
Abstract:
An electromechanical resonator including a drive electrode set having at least one pair of alternating pole interdigitated drive electrodes and including a sense electrode set having at least one pair of alternating pole interdigitated sense electrodes.
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