Continuous online self-calibration for gyroscopes through modulation of damping axes

    公开(公告)号:US11835339B1

    公开(公告)日:2023-12-05

    申请号:US17713789

    申请日:2022-04-05

    CPC classification number: G01C19/5776

    Abstract: A CVG having first and second degenerate resonator modes with each a damping rate; drive circuits for causing the resonator to oscillate in the first and second modes in response to first and second drive signals; first and second sense circuits for generating first and second sense signals in response to the resonator oscillating in the first and second modes; a signal processing circuit having control loops for generating the first and second drive signals based on the first and second sense signals; and first and second damping feedback circuits for generating first and second damping feedback signals proportional to the first and second damping rates; an adding the damping feedback signals to the first and second drive signals.

    HF-VHF quartz MEMS resonator
    4.
    发明授权

    公开(公告)号:US11101786B1

    公开(公告)日:2021-08-24

    申请号:US15899122

    申请日:2018-02-19

    Abstract: A MEMS resonator comprising a baseplate wafer; a piezoelectric HF-VHF resonator that comprises a monolithic piezoelectric member having at least two separate spring piezoelectric support members integrally extending therefrom, each spring piezoelectric support member having at least a rounded corner; said piezoelectric resonator being attached to the baseplate wafer by said support members; wherein said monolithic piezoelectric member comprises first and second main surfaces joined by side edges; at least one of said side edges forming an angle of between 90 and 105 degrees with one of the first and second main surfaces.

    High dynamic range gyroscope
    5.
    发明授权

    公开(公告)号:US10914585B1

    公开(公告)日:2021-02-09

    申请号:US16871497

    申请日:2020-05-11

    Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.

    Doubly-clamped bean quartz micro-resonator
    10.
    发明授权
    Doubly-clamped bean quartz micro-resonator 有权
    双夹紧豆石英微谐振器

    公开(公告)号:US09061886B1

    公开(公告)日:2015-06-23

    申请号:US13840160

    申请日:2013-03-15

    Abstract: A resonator includes a base substrate with anchor pads, and a quartz resonator device including a resonant microbridge with an electrode, a first flexure beam connected to an end of the microbridge, a second flexure beam connected to a second end of the microbridge, a first and second spring connected between the first flexure beam and first and second anchor mounts, respectively, a third and fourth spring connected between the second flexure beam and third and fourth anchor mounts, respectively, the anchor mounts connected to anchor pads on the base substrate. A single crystal quartz includes the microbridge, the flexure beams, the springs, and the anchor mounts. The flexure beams and the springs prevent buildup of stress in the microbridge.

    Abstract translation: 谐振器包括具有锚定垫的基底衬底和包括具有电极的谐振微桥的石英谐振器装置,连接到微桥的端部的第一挠曲梁,连接到微桥的第二端的第二挠曲梁,第一 以及第二弹簧,分别连接在第一弯曲梁和第一和第二锚定安装件之间,第三和第四弹簧分别连接在第二弯曲梁和第三和第四锚固装置之间,锚固装置分别连接到基底基板上的锚定垫。 单晶石英包括微桥,挠曲梁,弹簧和锚固安装座。 弯曲梁和弹簧防止在微桥中产生应力。

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