Invention Grant
- Patent Title: Apparatus for and method of source material delivery in a laser produced plasma EUV light source
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Application No.: US15696508Application Date: 2017-09-06
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Publication No.: US10237960B2Publication Date: 2019-03-19
- Inventor: Alexander I. Ershov , David Evans , Matthew Graham
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Arent Fox LLP
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20
Abstract:
A device and method are disclosed in which a source material delivery system can be reoriented so that the path of the source material is not directly towards an irradiation region in operating conditions in which the path is expected to be unpredictable. A shroud provided to protect the flow of source material from being disrupted is segmented so with one part of the shroud being movable with respect to another part of the shroud so that the movable part can avoid interfering with the path of the source material when it is not directly towards the irradiation region.
Public/Granted literature
- US20180027642A1 APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE Public/Granted day:2018-01-25
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