Invention Grant
- Patent Title: Method for manufacturing display device and method for manufacturing electronic device
-
Application No.: US15798459Application Date: 2017-10-31
-
Publication No.: US10243012B2Publication Date: 2019-03-26
- Inventor: Minato Ito , Yasuhiro Jinbo
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2015-108191 20150528
- Main IPC: H01L27/32
- IPC: H01L27/32 ; H01L27/12 ; H01L51/56 ; H01L51/52

Abstract:
A method for manufacturing a display device, which does not easily damage an electrode, is provided. In the first step, a terminal electrode, a wiring, and a functional layer are provided over a first substrate; the terminal electrode, the wiring, and the functional layer are electrically connected to one another; an insulating layer is provided over the terminal electrode; a first layer is provided over the terminal electrode and the insulating layer; an adhesive layer is sandwiched between the first substrate and a second substrate; the second substrate and the adhesive layer include a first opening overlapping with part of the first layer; and the insulating layer includes a second opening inside the first opening in a top view. In the second step, part of the first layer is removed by emitting particles having a high sublimation property to the first layer, so that the terminal electrode is exposed.
Public/Granted literature
- US20180069064A1 METHOD FOR MANUFACTURING DISPLAY DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE Public/Granted day:2018-03-08
Information query
IPC分类: