Invention Grant
- Patent Title: Forming TS cut for zero or negative TS extension and resulting device
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Application No.: US15433188Application Date: 2017-02-15
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Publication No.: US10249535B2Publication Date: 2019-04-02
- Inventor: Ruilong Xie , Daniel Chanemougame , Lars Liebmann , Nigel Cave
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/285 ; H01L27/088 ; H01L29/78

Abstract:
A method of forming a logic or memory cell with less than or equal to 0 nm of TS extending past the active fins and the resulting device are provided. Embodiments include forming gates across pairs of fins on a substrate; forming pairs of RSD between the gates on the fins; forming a planar SAC cap on each of the gates; forming a metal layer over the substrate coplanar with the SACs; forming a TS structure in the metal layer over the fins, the TS structure formed over the pairs of RSD, each upper portion having a width equal to or less than an overall width of a pair of fins; forming spacers on opposite sides of the upper portions; removing the metal layer between adjacent spacers; forming an ILD over the substrate; and forming a CA on each upper portion and a CB on a gate through the ILD.
Public/Granted literature
- US20180233412A1 FORMING TS CUT FOR ZERO OR NEGATIVE TS EXTENSION AND RESULTING DEVICE Public/Granted day:2018-08-16
Information query
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