Invention Grant
- Patent Title: Magnetic tunnel junctions suitable for high temperature thermal processing
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Application No.: US15862301Application Date: 2018-01-04
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Publication No.: US10255935B2Publication Date: 2019-04-09
- Inventor: Lin Xue , Chi Hong Ching , Jaesoo Ahn , Mahendra Pakala , Rongjun Wang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L27/20
- IPC: H01L27/20 ; G11B5/39 ; G11B5/31 ; G11C11/15 ; H01L21/768

Abstract:
Embodiments herein provide film stacks utilized to form a magnetic tunnel junction (MTJ) structure on a substrate, comprising: a buffer layer; a seed layer disposed over the buffer layer; a first pinning layer disposed over the seed layer; a synthetic ferrimagnet (SyF) coupling layer disposed over the first pinning layer; a second pinning layer disposed over the SyF coupling layer; a structure blocking layer disposed over the second pinning layer; a magnetic reference layer disposed over the structure blocking layer; a tunnel barrier layer disposed over the magnetic reference layer; a magnetic storage layer disposed over the tunnel barrier layer; a capping layer disposed over the magnetic storage layer, wherein the capping layer comprises one or more layers; and a hard mask disposed over the capping layer, wherein at least one of the capping layer, the buffer layer, and the SyF coupling layer is not fabricated from Ru.
Public/Granted literature
- US20190027169A1 MAGNETIC TUNNEL JUNCTIONS SUITABLE FOR HIGH TEMPERATURE THERMAL PROCESSING Public/Granted day:2019-01-24
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