Invention Grant
- Patent Title: Semiconductor device with tiered pillar and manufacturing method thereof
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Application No.: US15467794Application Date: 2017-03-23
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Publication No.: US10256114B2Publication Date: 2019-04-09
- Inventor: Ronald Patrick Huemoeller , Michael G. Kelly , Curtis Zwenger
- Applicant: Amkor Technology, Inc.
- Applicant Address: US AZ Tempe
- Assignee: AMKOR TECHNOLOGY, INC.
- Current Assignee: AMKOR TECHNOLOGY, INC.
- Current Assignee Address: US AZ Tempe
- Agency: McAndrews, Held & Malloy, Ltd.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/48 ; H01L23/00 ; H01L21/56 ; H01L25/00 ; H01L23/538 ; H01L23/31 ; H01L25/10 ; H01L21/683

Abstract:
A semiconductor device having one or more tiered pillars and methods of manufacturing such a semiconductor device are disclosed. The semiconductor device may include redistribution layers, a semiconductor die, and a plurality of interconnection structures that operatively couple a bottom surface of the semiconductor die to the redistribution layers. The semiconductor device may further include one or more conductive pillars about a periphery of the semiconductor die. The one or more conductive pillars may be electrically connected to the redistribution layers and may each comprise a plurality of stacked tiers.
Public/Granted literature
- US20180277394A1 SEMICONDUCTOR DEVICE WITH TIERED PILLAR AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-09-27
Information query
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