Invention Grant
- Patent Title: Three dimensional semiconductor memory device
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Application No.: US15708266Application Date: 2017-09-19
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Publication No.: US10256250B2Publication Date: 2019-04-09
- Inventor: Kihyun Kim , Chadong Yeo
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2014-0082550 20140702
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L27/11548 ; H01L27/11575 ; H01L27/11578

Abstract:
A three-dimensional semiconductor memory device is provided. A stacked structure is formed on a substrate. The stacked structure includes conductive patterns vertically stacked on the substrate. A selection structure including selection conductive patterns is stacked on the stacked structure. A channel structure penetrates the selection structure and the stacked structure to connect to the substrate. An upper interconnection line crosses the selection structure. A conductive pad is disposed on the channel structure to electrically connect the upper interconnection line to the channel structure. A bottom surface of the conductive pad is positioned below a top surface of the uppermost selection conductive pattern of the selection conductive patterns.
Public/Granted literature
- US20180006055A1 THREE DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2018-01-04
Information query
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