Invention Grant
- Patent Title: Vertical non-planar semiconductor device for system-on-chip (SoC) applications
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Application No.: US15353631Application Date: 2016-11-16
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Publication No.: US10263112B2Publication Date: 2019-04-16
- Inventor: Chia-Hong Jan , Walid M. Hafez , Curtis Tsai , Jeng-Ya D. Yeh , Joodong Park
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L27/12 ; H01L29/06 ; H01L29/786

Abstract:
Vertical non-planar semiconductor devices for system-on-chip (SoC) applications and methods of fabricating vertical non-planar semiconductor devices are described. For example, a semiconductor device includes a semiconductor fin disposed above a substrate, the semiconductor fin having a recessed portion and an uppermost portion. A source region is disposed in the recessed portion of the semiconductor fin. A drain region is disposed in the uppermost portion of the semiconductor fin. A gate electrode is disposed over the uppermost portion of the semiconductor fin, between the source and drain regions.
Public/Granted literature
- US20170069758A1 VERTICAL NON-PLANAR SEMICONDUCTOR DEVICE FOR SYSTEM-ON-CHIP (SOC) APPLICATIONS Public/Granted day:2017-03-09
Information query
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