Invention Grant
- Patent Title: Pressure sensor element and method of manufacturing the same
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Application No.: US15045684Application Date: 2016-02-17
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Publication No.: US10267699B2Publication Date: 2019-04-23
- Inventor: Chang Hyun Lim , Dae Hun Jeong , Tae Hun Lee
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2015-0092908 20150630
- Main IPC: G01L9/00
- IPC: G01L9/00
Abstract:
A pressure sensor element includes a die; a cavity and a trench formed in one surface of the die and defining therebetween a partition wall integral with and formed of the same material as the die; and a membrane formed on the die and covering the cavity and the trench.
Public/Granted literature
- US20170003187A1 PRESSURE SENSOR ELEMENT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-01-05
Information query
