发明授权
- 专利标题: Semiconductor device, memory circuit, method of manufacturing semiconductor device
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申请号: US15107977申请日: 2014-12-11
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公开(公告)号: US10269867B2公开(公告)日: 2019-04-23
- 发明人: Takashi Yokoyama , Taku Umebayashi
- 申请人: SONY CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: SONY CORPORATION
- 当前专利权人: SONY CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Chip Law Group
- 优先权: JP2014-001806 20140108
- 国际申请: PCT/JP2014/082871 WO 20141211
- 国际公布: WO2015/104947 WO 20150716
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L27/22 ; H01L21/8234 ; H01L29/423 ; H01L29/768 ; H01L43/02 ; H01L27/24 ; H01L29/78
摘要:
A semiconductor device of the technology includes a first diffusion section (22), a second diffusion section (21), a channel section (23), a gate section (24), and a stress application section (31, 32, or 33). In a semiconductor layer (10) having a groove (10A), the first diffusion section (22) is formed at or in the vicinity of a bottom of the groove (10A), the second diffusion section (21) is formed at an upper end of the groove (10A), and the channel section (23) is formed between the first diffusion section (22) and the second diffusion section (21). The gate section (24) is buried in the groove (10A) at a position opposing the channel section (23). The stress application section (31, 32, or 33) applies one of compressive stress and tensile stress to the channel section (23) in a normal direction to the semiconductor layer (10).
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