- 专利标题: Optical module with an adjustable optical element
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申请号: US13091457申请日: 2011-04-21
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公开(公告)号: US10274845B2公开(公告)日: 2019-04-30
- 发明人: Ivan Ivanov , Taoufik Mbarek , Mathias Huesing , Burkhard Corves
- 申请人: Ivan Ivanov , Taoufik Mbarek , Mathias Huesing , Burkhard Corves
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102010018224 20100423
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03F7/20 ; G02B7/182
摘要:
An optical module, in particular for microlithography, includes an optical element and a support unit. The optical element has at least one optically utilized area, which defines a rotational axis of symmetry. To support the optical element the support unit has a plurality of more than three support elements. Each of the support elements in the area of a first end is connected with the optical element and in the area of a second end is connected with the support structure. The support unit is designed such that the degree of freedom of rotation of the optical element around the rotational axis of symmetry is restricted, while the position or orientation of the optical element in the other five degrees of freedom is spatially adjustable via the support unit.
公开/授权文献
- US20110261341A1 OPTICAL MODULE WITH AN ADJUSTABLE OPTICAL ELEMENT 公开/授权日:2011-10-27
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