公开(公告)号：US10274845B2

公开(公告)日：2019-04-30

申请号：US13091457

申请日：2011-04-21

申请人： Ivan Ivanov ,  Taoufik Mbarek ,  Mathias Huesing ,  Burkhard Corves

发明人： Ivan Ivanov ,  Taoufik Mbarek ,  Mathias Huesing ,  Burkhard Corves

IPC分类号： G03B27/54 ,  G03F7/20 ,  G02B7/182

摘要： An optical module, in particular for microlithography, includes an optical element and a support unit. The optical element has at least one optically utilized area, which defines a rotational axis of symmetry. To support the optical element the support unit has a plurality of more than three support elements. Each of the support elements in the area of a first end is connected with the optical element and in the area of a second end is connected with the support structure. The support unit is designed such that the degree of freedom of rotation of the optical element around the rotational axis of symmetry is restricted, while the position or orientation of the optical element in the other five degrees of freedom is spatially adjustable via the support unit.

公开(公告)号：US20110261341A1

公开(公告)日：2011-10-27

申请号：US13091457

申请日：2011-04-21

申请人： Ivan Ivanov ,  Taoufik Mbarek ,  Mathias Huesing ,  Burkhard Corves

发明人： Ivan Ivanov ,  Taoufik Mbarek ,  Mathias Huesing ,  Burkhard Corves

IPC分类号： G03B27/54

CPC分类号： G03B27/54 ,  G02B7/1827 ,  G03F7/70825

摘要： An optical module, in particular for microlithography, includes an optical element and a support unit. The optical element has at least one optically utilised area, which defines a rotational axis of symmetry. To support the optical element the support unit has a plurality of more than three support elements. Each of the support elements in the area of a first end is connected with the optical element and in the area of a second end is connected with the support structure. The support unit is designed such that the degree of freedom of rotation of the optical element around the rotational axis of symmetry is restricted, while the position or orientation of the optical element in the other five degrees of freedom is spatially adjustable via the support unit.

摘要翻译： 特别是用于微光刻的光学模块包括光学元件和支撑单元。 光学元件具有至少一个限定旋转对称轴线的光学利用区域。 为了支撑光学元件，支撑单元具有多个多于三个的支撑元件。 第一端的区域中的每个支撑元件与光学元件连接，并且在第二端的区域中与支撑结构连接。 支撑单元被设计成使得围绕旋转对称轴线的光学元件的旋转自由度受到限制，而另外五个自由度中的光学元件的位置或取向通过支撑单元在空间上是可调节的。