Invention Grant
- Patent Title: Recovery method for abrasive
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Application No.: US15556910Application Date: 2016-03-09
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Publication No.: US10286522B2Publication Date: 2019-05-14
- Inventor: Chie Inui , Akihiro Maezawa , Yuuki Nagai , Natsumi Hirayama
- Applicant: Konica Minolta, Inc.
- Applicant Address: JP Tokyo
- Assignee: KONICA MINOLTA, INC.
- Current Assignee: KONICA MINOLTA, INC.
- Current Assignee Address: JP Tokyo
- Agency: Lucas & Mercanti, LLP
- Priority: JP2015-055772 20150319
- International Application: PCT/JP2016/057293 WO 20160309
- International Announcement: WO2016/147968 WO 20160922
- Main IPC: B24B37/02
- IPC: B24B37/02 ; B24B37/24 ; B24B37/34 ; B24B57/00 ; B24B57/02

Abstract:
A method for collecting an abrasive from an abrasive slurry which has been used for polishing an object including silicon as a main component includes: (i) adding a solvent to the abrasive slurry; (ii) dissolving particles of the polished object among components of the polished object contained in the abrasive slurry; and (iii) filtering the abrasive slurry to collect the abrasive, in which the steps (i) to (iii) are carried out without a pH adjuster to remove components of the polished object to collect the abrasive.
Public/Granted literature
- US20180056483A1 RECOVERY METHOD FOR ABRASIVE Public/Granted day:2018-03-01
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