Invention Grant
- Patent Title: Method of generating an examination recipe and system thereof
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Application No.: US15701371Application Date: 2017-09-11
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Publication No.: US10290087B2Publication Date: 2019-05-14
- Inventor: Ariel Shkalim , Moshe Amzaleg , Eyal Neistein , Shlomo Tubul , Mark Geshel , Elad Cohen
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00 ; G06T7/11

Abstract:
There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.
Public/Granted literature
- US20190080447A1 METHOD OF GENERATING AN EXAMINATION RECIPE AND SYSTEM THEREOF Public/Granted day:2019-03-14
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