公开(公告)号：US10460434B2

公开(公告)日：2019-10-29

申请号：US15683726

申请日：2017-08-22

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Limor Martin ,  Elad Cohen ,  Eyal Neistein ,  Moshe Amzaleg

IPC: G06T7/00 ,  G06T5/00 ,  H01L21/67 ,  G01N21/956 ,  H01L21/66

Abstract: There are provided system and method of detecting defects on a specimen, the method comprising: capturing a first image from a first die and obtaining one or more second images; receiving: i) a first set of predefined first descriptors each representing a type of DOI, and ii) a second set of predefined second descriptors each representing a type of noise; generating at least one difference image based on difference between pixel values of the first image and pixel values derived from the second images; generating at least one third image, comprising: computing a value for each given pixel of at least part of the at least one difference image based on the first and second sets of predefined descriptors, and surrounding pixels centered around the given pixel; and determining presence of defect candidates based on the at least one third image and a predefined threshold.

公开(公告)号：US10275872B2

公开(公告)日：2019-04-30

申请号：US15685995

申请日：2017-08-24

Applicant: Applied Materials Israel Ltd.

Inventor： Karen Pomeranz ,  Eyal Neistein ,  Vivek Balasubramanian ,  Moshe Amzaleg ,  Eyal Bassa

IPC: G06K9/00 ,  G06T7/00

Abstract: There are provided system and method of detecting repeating defects on a specimen, the specimen obtained by printing two or more mask fields thereon, each of mask field comprising multiple dies, the method comprising: scanning the specimen to capture a plurality of first images from first dies located at the same position in the mask fields, and, for each first image, capture two or more second images from dies located in different positions from the first dies; generating a plurality of third images corresponding to the plurality of first images; generating, an average third image constituted by pixels with values computed as accumulated pixel values of corresponding pixels in the plurality of third images divided by the number of the two or more mask fields; and determining presence of repeating defects on the specimen based on the average third image and a predefined defect threshold.

公开(公告)号：US09613255B2

公开(公告)日：2017-04-04

申请号：US14673712

申请日：2015-03-30

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Ariel Shkalim ,  Efrat Rozenman

IPC: G06K9/62 ,  G06K9/00 ,  G06F3/048

CPC classification number: G06K9/00161 ,  G06F3/048 ,  G06K9/00577 ,  G06K9/6202 ,  G06T2207/30148

Abstract: Methods, systems, and computer program products for signature detection. One example of a method includes: acquiring an article defect density map comprising a plurality of sections corresponding to a first resolution level which is indicative of defect numbers for the sections, and determining a distribution representative of the defect numbers or function thereof; determining a threshold in accordance with said distribution, and identifying sections, out of said plurality of sections in the article defect density map, with defect numbers or function thereof above the threshold; and clustering at least part of adjoining identified sections, into one or more signatures, thus detecting said one or more signatures.

公开(公告)号：US09558548B2

公开(公告)日：2017-01-31

申请号：US14738370

申请日：2015-06-12

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzen ,  Efrat Rozenman

IPC: G06K9/00 ,  G06T7/00 ,  H01L21/67

CPC classification number: G06T7/001 ,  G06T7/0002 ,  G06T2207/30148 ,  H01L21/67288

Abstract: A system includes a memory and a processor device operatively coupled to the memory to obtain an inspected noise-indicative value representative of an analyzed pixel of an inspected image of an inspected object, and a reference noise-indicative value representative for each of multiple reference pixels of the inspected image. The processor device computes a representative noise-indicative value based on the inspected noise-indicative value and multiple reference noise-indicative values, calculates a defect-indicative value based on an inspected value representative of the analyzed pixel and determines a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

Abstract translation: 系统包括可操作地耦合到存储器的存储器和处理器装置，以获得表示被检查对象的被检查图像的分析像素的检查噪声指示值，以及代表多个参考像素中的每一个的参考噪声指示值 的被检查图像。 处理器设备基于被检查的噪声指示值和多个参考噪声指示值来计算代表性噪声指示值，基于表示分析像素的检测值来计算缺陷指示值，并且确定存在缺陷 基于代表性噪声指示值和缺陷指示值的分析像素。

公开(公告)号：US10408764B2

公开(公告)日：2019-09-10

申请号：US15703937

申请日：2017-09-13

Applicant: Applied Materials Israel Ltd.

Inventor： Saar Shabtay ,  Moshe Amzaleg ,  Zvi Goren

IPC: G01N21/88 ,  G06T7/00 ,  G01N21/95 ,  G01N21/84

Abstract: Examination system, method and computer-readable medium, the method comprising: processing by a processor using a first recipe at least one image comprised in images and metadata generated by an inspection tool and stored, to detect a first location set of first potential defects and attributes thereof; selecting and imaging part of the first location set with a review tool to obtain an image set; obtaining classification results of said first potential defects and determining a further recipe based thereon; processing the image using the further recipe for detecting a further location set of further defects; selecting part of the further location set; imaging the part with the review tool to obtain a further image set, and obtaining further classification results; and repeating determining the further recipe, processing the image, selecting and imaging part of the further location set, and obtaining further classification results, until a stopping criteria is met.

公开(公告)号：US09235885B2

公开(公告)日：2016-01-12

申请号：US13756399

申请日：2013-01-31

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Nir Ben David Dodzin ,  Vered Gatt ,  Yair Hanani ,  Efrat Rozenman

IPC: G06T7/00 ,  G01N21/956 ,  H01L21/66

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G01N2021/95615 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01L22/12

Abstract: A system capable of inspecting an article for defects, the system including: a patch comparator, configured to determine with respect to each of a plurality of reference patches in a reference image a similarity level, based on a predefined patch-similarity criterion and on a source patch defined in the reference image; an evaluation module, configured to rate each inspected pixel out of multiple inspected pixels of the inspection image with a representative score which is based on the similarity level of a reference patch associated with a reference pixel corresponding to the inspected pixel; a selection module, configured to select multiple selected inspected pixels based on the representative scores of the multiple inspected pixels; and a defect detection module, configured to determine a presence of a defect in the candidate pixel based on an inspected value of the candidate pixel and inspected values of the selected inspected pixels.

Abstract translation: 一种能够检查物品的缺陷的系统，所述系统包括：补丁比较器，被配置为基于预定的补丁相似性准则，在参考图像中确定相关性级别中的多个参考补丁中的每一个，并且基于 参考图片中定义的源补丁; 评估模块，其被配置为使用基于与对应于被检查像素的参考像素相关联的参考块的相似度级别的代表性分数对所述检查图像的多个被检查像素中的每个被检查像素进行评估; 选择模块，被配置为基于所述多个被检查像素的代表性分数来选择多个选择的被检查像素; 以及缺陷检测模块，被配置为基于候选像素的检查值和所选择的被检查像素的检查值来确定候选像素中的缺陷的存在。

公开(公告)号：US09070014B2

公开(公告)日：2015-06-30

申请号：US13773535

申请日：2013-02-21

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzin ,  Efrat Rozenman

IPC: G06K9/00

CPC classification number: G06K9/00536 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A defect detection system for computerized detection of defects, the system including: an interface for receiving inspection image data including information of an analyzed pixel and of a plurality of reference pixels; and a processor, including: a differences analysis module, configured to: (a) calculate differences based on an inspected value representative of the analyzed pixel and on multiple reference values, each of which is representative of a reference pixel among the plurality of reference pixels; wherein the differences analysis module is configured to calculate for each of the reference pixels a difference between the reference value of the reference pixel and the inspected value; and (b) compute a representative difference value based on a plurality of the differences; and a defect analysis module, configured to determine a presence of a defect in the analyzed pixel based on the representative difference value.

Abstract translation: 一种用于计算机检测缺陷的缺陷检测系统，所述系统包括：用于接收包括所分析的像素和多个参考像素的信息的检查图像数据的接口; 以及处理器，包括：差异分析模块，被配置为：（a）基于代表所分析的像素的检查值和多个参考值计算差异，所述多个参考值代表所述多个参考像素中的参考像素 ; 其中所述差异分析模块被配置为针对每个参考像素计算所述参考像素的参考值和所述被检测值之间的差; 和（b）基于多个差异来计算代表性差值; 以及缺陷分析模块，被配置为基于所述代表性差值来确定所分析的像素中的缺陷的存在。

公开(公告)号：US20140278227A1

公开(公告)日：2014-09-18

申请号：US13831446

申请日：2013-03-14

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Nir Ben-David

IPC: G01B21/02 ,  G01R31/265

CPC classification number: G01B21/02

Abstract: A computerized method for estimating a size of a nanometric part of an inspected article, the method including: (a) acquiring inspection results generated by processing an inspection image which was generated by collecting signals arriving from a portion of the article which includes the part by an inspection system; (b) fitting to the inspection results an approximation function from a group of functions which is related to a response pattern of the inspection system; and (c) determining an estimated size of the part, based on at least one parameter of the approximation function.

Abstract translation: 一种用于估计被检物品的纳米部分的尺寸的计算机化方法，所述方法包括：（a）获取通过处理检查图像产生的检查结果，所述检查图像是通过收集从包括该部分的物品的一部分到达的信号而产生的信号， 检查系统; （b）从检查系统的响应模式相关的一组功能拟合检验结果; 以及（c）基于所述近似函数的至少一个参数来确定所述部分的估计大小。

公开(公告)号：US10290092B2

公开(公告)日：2019-05-14

申请号：US14279192

申请日：2014-05-15

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Nir Ben-David Dodzin

IPC: G06K9/00 ,  G06T7/00 ,  G01N21/956

Abstract: A system configured to detect defects in an inspection image generated by collecting signals arriving from an article, the system comprising a tangible processor which includes: (i) a distribution acquisition module, configured to acquire a distribution of comparison values, each of the comparison values being indicative of a relationship between a value associated with a pixel of the inspection image and a corresponding reference value; (ii) a fitting module, configured to fit to the distribution an approximation function out of a predefined group of functions; and (iii) a defect detection module, configured to: (a) set a defect detection criterion based on a result of the fitting; and to (b) determine a presence of a defect in the inspection image, based on the defect detection criterion.

公开(公告)号：US10290087B2

公开(公告)日：2019-05-14

申请号：US15701371

申请日：2017-09-11

Applicant: Applied Materials Israel Ltd.

Inventor： Ariel Shkalim ,  Moshe Amzaleg ,  Eyal Neistein ,  Shlomo Tubul ,  Mark Geshel ,  Elad Cohen

IPC: G06K9/00 ,  G06T7/00 ,  G06T7/11

Abstract: There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.